What’s Physical Design Rule
1. Interface between the circuit designer and process engineer
2. Guidelines for constructing process masks
3. Unit dimension: minimum line width
2. Guidelines for constructing process masks
3. Unit dimension: minimum line width
scalable design rules: lambda parameter
absolute dimensions: micron rules
absolute dimensions: micron rules
4. Rules constructed to ensure that design works even when small fab errors (within some tolerance) occur
5. A complete set includes
5. A complete set includes
set of layers
intra-layer: relations between objects in the same layer
inter-layer: relations between objects on different layers
intra-layer: relations between objects in the same layer
inter-layer: relations between objects on different layers
What’s Physical Design Rule
1. Interface between the circuit designer and process engineer
2. Guidelines for constructing process masks
3. Unit dimension: minimum line width
2. Guidelines for constructing process masks
3. Unit dimension: minimum line width
scalable design rules: lambda parameter
absolute dimensions: micron rules
absolute dimensions: micron rules
4. Rules constructed to ensure that design works even when small fab errors (within some tolerance) occur
5. A complete set includes
5. A complete set includes
set of layers
intra-layer: relations between objects in the same layer
inter-layer: relations between objects on different layers
intra-layer: relations between objects in the same layer
inter-layer: relations between objects on different layers
Why Physical Design Rule:
To be able to tolerate some level of fabrication errors such as
1. Mask misalignment
2. Dust
3. Process parameters (e.g., lateral diffusion)
4. Rough surfaces
2. Dust
3. Process parameters (e.g., lateral diffusion)
4. Rough surfaces
Basic Physical Design Rule:
- Width (INTERNAL)
- Spacing (EXTERNAL)
- Overlap (ENCLOSE)
- Extension (ENCLOSE)
- Clearance (EXTERNAL, ENCLOSE)
For Logic Design Rule, please refer to http://vlsi-concept.blogspot.com/2009/01/design-rule-checking-drc.html